Integrated circuit isolation

Details Integrated circuit isolation Integrated circuit isolation

1984-06-15

1986-04-08

Hearn, Brian E.

Metal working

Method of mechanical manufacture

Assembling or joining

29578, 29580, 148DIG50, 357 50, H01L 2176

Patent

active

045803307

ABSTRACT:
An integrated circuit isolation technology wherein the nitride-sidewall methods of the prior art are improved by performing an undercut and backfill before the second nitride (the sidewall nitride which prevents encroachment) is added to the first nitride (which covers the moat areas). Thus, the butt joint between the two nitrides is made more secure, and localized bird's-beaking at the butt joint between the moat nitride and the sidewall nitride does not occur.

REFERENCES:
patent: 4462846 (1984-07-01), Varshney
Chiu, K. Y. et al., "The Sloped-Wall SWAMI . . . Technology" in IEEE Transactions on Electron Devices, vol. Ed-30, No. 11, Nov.-1983, pp. 1506-1511.

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