Wafer transfer system having vertical lifting capability

Details Wafer transfer system having vertical lifting capability Wafer transfer system having vertical lifting capability

1996-05-22

1998-04-21

Bucci, David A.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414937, 414786, B65B 106

Patent

active

057411093

ABSTRACT:
A wafer transfer system is operable with a front or side loading wafer carrier to move one or more wafers in a straight line from the carrier to a position in which the wafers are accessible for further processing by movement along the same straight line. The transfer system provides a wafer extractor which employs a plurality of paired fingers of a size and configuration to fit between the spaced, stacked wafers in the carrier. After insertion between the wafers, the fingers are movable by a small amount vertically to lift the wafers off the shoulders of the carrier. The fingers, now supporting the wafers, are movable generally horizontally along a straight line to remove the wafers from the carrier. The fingers are supported from a support structure in a manner which provides clearance for the wafers to pass through the support structure for further processing along the same straight line path.

REFERENCES:
patent: 4427332 (1984-01-01), Manriquez
patent: 4550242 (1985-10-01), Uehara et al.
patent: 4775281 (1988-10-01), Prentakis
patent: 4778331 (1988-10-01), Kimata et al.
patent: 4900212 (1990-02-01), Mikahara
patent: 4909701 (1990-03-01), Hardegen et al.
patent: 5026239 (1991-06-01), Chiba et al.
patent: 5030056 (1991-07-01), Kitayama et al.
patent: 5061144 (1991-10-01), Akimoto et al.
patent: 5183370 (1993-02-01), Cruz
patent: 5382128 (1995-01-01), Takahashi et al.
patent: 5387067 (1995-02-01), Grunes
patent: 5409348 (1995-04-01), Suzuki
patent: 5443346 (1995-08-01), Murata et al.
patent: 5460478 (1995-10-01), Akimoto et al.
patent: 5464313 (1995-11-01), Ohsawa
patent: 5588789 (1996-12-01), Muka et al.
patent: 5607276 (1997-03-01), Muka et al.
patent: 5609459 (1997-03-01), Muka
patent: 5613821 (1997-03-01), Muka et al.
patent: 5615988 (1997-04-01), Wiesler et al.

Affiliated with

Also associated with

Rating

Wafer transfer system having vertical lifting capability does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer transfer system having vertical lifting capability, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer transfer system having vertical lifting capability will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2053001