Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1990-06-08
1992-11-03
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
269 21, 384 12, 324158P, G01R 3102, F16C 3206, B25B 1100
Patent
active
051608839
ABSTRACT:
ATE is mounted directly to a support surrounding and removably receiving probe cards of differing thickness. An electrically heated chuck having a variable heat transfer coefficient heat exchanging face confronting a liquid nitrogen supplied plenum exhibits a temperature that varies with electrical heater load, rate of liquid nitogen supply, and heat transfer coefficient of the heat exchanging face. The rate of liquid nitrogen supply is varied as a function of whether or not the electrical heater load falls outside predetermined upper and lower bounds to establish and maintain set point temperature over a range of set point temperatures including liquid nitrogen temperature and ambient temperature. The chuck is mounted for X,Y movement on load-balanced air/vacuum bearing, and is mounted for Z movement to accommodate different thickness probe cards. A load-lock having a pivoting cassette receiving tray that pivots with a pivoting transfer arm is mounted for Z movement with the chuck. A vacuum pump selectively lowers the temperature at which the supplied liquid nitrogen boils. A positive pressure of N.sub.2 gas is maintained to prevent moisture condensation in the load-lock and on the operative surfaces of the chuck.
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John H. Blanz Company, Inc.
Karlsen Ernest F.
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