Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

1990-12-26

1992-11-03

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

H01L 4108

Patent

active

051608693

ABSTRACT:
A surface acoustic wave device which comprises a diamond or diamond-like carbon layer, a ZnO piezoelectric layer and a comb-like electrode and has a structure having a large surface wave propagation velocity and a large electromechanical coupling factor which are achieved by defining a thickness of the ZnO layer and a mode.

REFERENCES:
patent: 4571519 (1986-02-01), Kawabata et al.
patent: 4752709 (1988-06-01), Fujishima et al.
patent: 4952832 (1990-08-01), Imai et al.

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