Substrate conveying device and substrate conveying method

Details Substrate conveying device and substrate conveying method Substrate conveying device and substrate conveying method

1998-05-12

1999-10-19

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

134 66, 134902, 414937, 414941, B08B 300, B65G 4907

Patent

active

059671599

ABSTRACT:
According to the present invention, there is provided a substrate conveying apparatus for loading/unloading a substrate to/from a processing section, including an arm for holding the substrate on an upper surface thereof, an arm drive mechanism for driving the arm such as to load/unload the substrate to/from the processing section, first and second suction members each having an opening communicating to a suction hole of the suction passage, for supporting the substrate by at least an edge portion of the opening, and a switching mechanism for selectively switching a mode between the support of the substrate by the first suction member and that by the second suction member.

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patent: 5842824 (1998-12-01), Nishi
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