Anti-vibration apparatus and method

Data processing: generic control systems or specific application – Specific application – apparatus or process – Mechanical control system

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Details

248550, 318651, F16F 1502, G05D 1900

Patent

active

061285528

ABSTRACT:
An anti-vibration apparatus has a feedback loop based on vibration information from an anti-vibration table, and a feedforward loop based on vibration information from a setting foundation. A compensation mechanism in the feedforward loop uses an adaptive filter. The adaptive filter sequentially sets parameters in the compensation mechanism on the basis of the vibration information form the anti-vibration table and setting foundation. The vibration information consists of vibration component information indicating vibrations in units of motion directions, and a determination mechanism and an operation switching mechanism arranged at the input side of the adaptive filter select the vibration component information and supply the selected information to the adaptive filter.

REFERENCES:
patent: 5478043 (1995-12-01), Wakui
patent: 5545962 (1996-08-01), Wakui
patent: 5568032 (1996-10-01), Wakui
patent: 5750897 (1998-05-01), Kato

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