Fishing – trapping – and vermin destroying
Patent
1994-09-28
1996-05-21
Fourson, George
Fishing, trapping, and vermin destroying
437200, 437201, H01L 2144
Patent
active
055189601
ABSTRACT:
According to a semiconductor device and a manufacturing method thereof of the invention, silicon electrodes are connected to silicon layers in a wiring layer including silicon layers and refractory metal silicide layers formed on silicon layers and an amorphous silicon layer formed on the refractory silicide layer. Thus, good contact between the silicon electrodes and the wiring layer can be provided without the influence of a native oxide film formed on the surface of the refractory metal silicide layers. As a result, a semiconductor device and a manufacturing method thereof implementing reduced contact resistance to a wiring layer including a refractory metal silicide film can be provided.
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Bilodeau Thomas G.
Fourson George
Mitsubishi Denki & Kabushiki Kaisha
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