Gas and fire alarm and control system for semiconductor factorie

Details Gas and fire alarm and control system for semiconductor factorie Gas and fire alarm and control system for semiconductor factorie

1986-10-03

1987-07-28

Rowland, James L.

Communications: electrical

Condition responsive indicating system

Specific condition

340634, 427 86, G08B 1710

Patent

active

046834630

ABSTRACT:
An alarm and control system for semiconductor factories or the like includes, at locations where poisonous and inflammable gases such as silane gas are used as in the manufacturing process of semiconductors, gas detectors to detect the leakage of the treatment gases and fire detectors to detect products of combustion of the treatment gases, and these detectors are adapted to cause, upon any changes in the output state of either of them, an alarm to issue and a protection device such as a fire distinguishing device as well as the manufacturing process to be controlled.

REFERENCES:
patent: 4069018 (1978-01-01), Karna et al.
patent: 4088986 (1978-05-01), Boucher
patent: 4316184 (1982-02-01), Nagel
patent: 4369031 (1983-01-01), Goldman et al.

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