Deposition barrier

Details Deposition barrier Deposition barrier

1995-08-03

1996-05-21

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

118715, C23C 1400

Patent

active

055185487

ABSTRACT:
Deposition sources deposit material onto mirrors used in ring laser gyros. The mirrors are placed in a rotating apparatus called a planet which rotates above the deposition sources which emit the material upwards. This operation will result alternating, multiple layers of the differing materials deposited onto the mirror. A barrier placed between the deposition sources prevents material from being deposited at high angles which increases the efficiency and ideal operability of the mirrors in the ring laser gyro.

REFERENCES:
patent: 5133286 (1992-07-01), Choo

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