Gas separation: processes – Solid sorption – Including reduction of pressure
Patent
1994-10-13
1996-05-21
Spitzer, Robert
Gas separation: processes
Solid sorption
Including reduction of pressure
B01D 5302
Patent
active
055185282
ABSTRACT:
An adsorption-desorption apparatus, for storage and dispensing of a gas selected from the group consisting of hydride gases, halide gases, and organometallic Group V gaseous compounds, wherein the gas to be dispensed is adsorbed on a physical sorbent medium and selectively dispensed by pressure differential desorption of the sorbate gas from the sorbent material. The sorbent medium preferably is devoid of concentrations of water, metals, and oxidic transition metal species which decompose the sorbate gas in the storage and dispensing vessel, e.g., containing less than 500 parts-per-million by weight of water and oxidic transition metal species, based on the weight of the physical sorbent medium. A cryopumping gas storage and delivery system is also disclosed for neat, high pressure, high purity delivery of the dispensed product gas.
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McManus, J. V., Tom, G. M., and Kirk, R., "A Zeolite-Based Atmospheric Pressure Hydride Gas Source for Ion Implantation," paper presented at the X International Conference on Ion Implantation Technology, Catania, Italy, 13-17 Jun. 1994.
McManus James V.
Tom Glenn M.
Advanced Technology & Materials Inc.
Elliott Janet R.
Hultquist Steven J.
Spitzer Robert
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