Apparatus and method for neutralizing ion beams

Details Apparatus and method for neutralizing ion beams Apparatus and method for neutralizing ion beams

1982-03-05

1983-12-06

Demers, Arthur P.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204192E, 204298, 2504923, C23C 1500

Patent

active

044192037

ABSTRACT:
Apparatus is described for neutralizing high intensity ion beams. A technique for neutralizing a positive ion beam from internally plasma produced electrons is provided whereby electrons are added to the positive ion beam by maintaining the voltage between the cathode, anode, and accelerator grid in a predetermined relationship. Other higher energy ion beams are neutralized in another technique by directing the neutralizing beam of charged particles to intersect a sputtering beam.

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Geis et al., J. Vac. Sci. Technol., 19(4), 1981, pp. 1390-1393.

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