Metal coatings

Details Metal coatings Metal coatings

1981-12-17

1983-12-06

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

427237, 427238, 427239, 204192C, C23C 1500

Patent

active

044192029

ABSTRACT:
In the practice of the sputter ion plating of refractory metals or refractory metal compounds on substrates to form smooth dense substantially porous-free coatings a method whereby the substrate bias potential can be reduced, thereby reducing the generation of substrate heat, is provided wherein the source material consists of a refractory metal or a refractory metal compound and one or more further metals. The further metal may be another refractory metal. Typical refractory and further metals are tungsten and tantalum.
The source material may suitably be a bundle of wires consisting of wires of the refractory metal or metal compound and wires of the further metal.
For predetermined glow discharge conditions of source and substrate potentials and ionizable gas pressure, the source material preferably consists of the refractory metal or metal compound and the further metal in proportions to form a solid solution on the substrate.
The ionizable gas should be an inert gas of high atomic number. The inert gas may be mixed with a gas capable of reacting chemically with the refractory metal or the further metal, under the conditions of the glow discharge, thereby forming a coating of a compound on the substrate. For example, a hard refractory nitride may be formed using a reactive gas mixture of nitrogen in argon and tantalum and titanium as the refractory and further metals respectively.

REFERENCES:
J. M. Harris et al., "Studies of the Ti-W Metallization System on Si", J. Electrochem. Soc., vol. 123, pp. 120-124 (1976).
J. E. Greene et al., "Adhesion of Sputter-Deposited Carbide Films to Steel Substrates", Thin Solid Films, vol. 37, pp. 373-385 (1976).
E. Eser et al., "Friction & Wear Results from WC+Co Coatings by -dc Biased RF Sputtering in a Helium Atmosphere", J. Vac. Sci. Technol. vol. 15, pp. 401-405 (1978).
T. Spalvins, "Survey of Ion Plating Sources", J. Vac. Sci. Technol., vol. 17, pp. 315-321 (1980).

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