Fast variable flow microelectromechanical valves

Valves and valve actuation – Electrically actuated valve

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

251331, F16K 3106, F16K 700

Patent

active

060895349

ABSTRACT:
A variable fluid flow valve is disclosed. The valve can be batch fabricated in two dimensional valve arrays, with all valves in the array being controlled in parallel to achieve high flow rates without increasing response time. Typically, each valve includes a valve housing having an aperture plate defining an elongated aperture therethrough, and an opposing plate positioned in spaced apart relationship to the aperture plate. In one embodiment a flexible film or strip is attached at its first end to the aperture plate and at its second end to the opposing plate. In another embodiment of the invention, the flexible film is attached at only one end and is free to move at the other end. In both types of valves, valve action is provided by using electrodes to variably move the flexible film from an aperture blocking to an aperture non-blocking position. The flexible film may be moved in a continuously variable manner or a discretely variable manner, depending upon the electrode configuration. Binary valves in matrixes may also be used with the elongated opening.

REFERENCES:
patent: 3243181 (1966-03-01), Lyman
patent: 3405977 (1968-10-01), Albright
patent: 3414331 (1968-12-01), Fogg
patent: 3422411 (1969-01-01), Smith, Jr.
patent: 3437335 (1969-04-01), Gluskin
patent: 3550964 (1970-12-01), Spyropoulos
patent: 3918706 (1975-11-01), Craft
patent: 4493548 (1985-01-01), Ateya
patent: 4577854 (1986-03-01), Bachman et al.
patent: 4618292 (1986-10-01), Judge et al.
patent: 4874273 (1989-10-01), Tokisue et al.
patent: 5082242 (1992-01-01), Bonne et al.
patent: 5284179 (1994-02-01), Shikida et al.
patent: 5417235 (1995-05-01), Wise et al.
patent: 5441597 (1995-08-01), Bonne et al.
patent: 5497987 (1996-03-01), Henn et al.
patent: 5897097 (1999-04-01), Biegelsen et al.
patent: 5901939 (1999-05-01), Cabuz et al.
Konishi, S. et al., A Conveyance System Using Air Flow Based on the Concept of Distributed Micro Motion Systems. Journal of Microelectromechanical Systems, vol. 3, No. 2, Jun. 1994, pp. 54-58.
Konishi, S. et al., System Design for Cooperative Control of Arrayed Microactuators. Proceedings of the IEEE Micro Electro Mechanical Systems 1995, IEEE, Piscataway, NJ, USA 95CH35754, pp. 322-327.
Paivanas, J.A. et al., Air Film System for Handling Semiconductor Wafers. IBM J. Res. Develop., vol. 23, No. 4, Jul. 1979, pp. 361-375.
Micro Electrical Mechanical Systems, sponsored by IEEE Robotics & Automation Society and ASME Dynamic Systems & Control Division, presented Jan. 29-Feb. 2, 1995 in Amsterdam, Netherlands, By: Legtenberg, Berenschot, Elwenspoek and Fluitman, Title: "Electrostatic Curved Electrode Actuators", pp. 37-42, IEEE Catalog No. 95CH35754.
A Low Power, Tight Seal, Polymide Electrostatic Microvalve, paper, presented Nov. 17-Nov. 22, 1996 in Atlanta, GA, by: Abraham P. Lee, Julie Hamilton, and Jimmy Trevino of the Lawrence Livermore National Laboratory Microtechnology Center, Livermore, CA.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Fast variable flow microelectromechanical valves does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fast variable flow microelectromechanical valves, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fast variable flow microelectromechanical valves will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2028000

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.