Process for preparing a thin film of bi-type oxide superconducto

Details Process for preparing a thin film of bi-type oxide superconducto Process for preparing a thin film of bi-type oxide superconducto

1991-11-21

1993-09-14

Weisstuch, Aaron

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

20419224, 505731, 505782, H01L 3924, C23C 1435

Patent

active

052448738

ABSTRACT:
A process for preparing a single crystal thin film made of oxide superconductor of Bi, Sr, Ca, and Cu on a substrate by a sputtering method using a target made of a sintered oxide of Bi, Sr, Ca, and Cu and having its c-axis oriented in parallel with the surface of the substrate.
The sputtering is effected by 90.degree. off-axis magnetron sputtering at a substrate temperature between 500.degree. C. and 750.degree. C. at a gas pressure between 0.001 Torr and 1 Torr.

REFERENCES:
patent: 4963524 (1990-10-01), Yamazaki
patent: 5032571 (1991-07-01), Takemura

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