Multi zone illuminator with embeded process control sensors and

Details Multi zone illuminator with embeded process control sensors and Multi zone illuminator with embeded process control sensors and

1992-04-16

1993-12-07

Reynolds, Bruce A.

Electric resistance heating devices

Heating devices

Radiant heater

118725, 36457103, 315149, C23C 1648, H05B 300, H01L 21324

Patent

active

052689891

ABSTRACT:
A multi-zone illuminator for processing semiconductor wafers comprises a plurality of source lamps and dummy lamps embedded in the reflector side of a lamp housing. The source lamps are arranged in a plurality of concentric circular zones. The illuminator also comprises plurality of light pipes for receiving multi-point temperature sensors to measure the semiconductor wafer temperature and its distribution uniformity. A gold-plated reflector plate is attached to the bottom side of the lamp housing for reflecting and directing optical energy toward the wafer surface. The distance between the reflector plate and the wafer and the lamps and the wafer may be adjusted with the use of a spacial elevator and adaptor assembly. The multi-zone illuminator allows uniform wafer heating during both transient and steady-state wafer heating cycles.

REFERENCES:
patent: 4836138 (1989-06-01), Robinson et al.
patent: 4859832 (1989-08-01), Uehara et al.
patent: 4890245 (1989-12-01), Yomoto et al.
patent: 4956538 (1990-09-01), Moslehi
patent: 4979133 (1990-12-01), Arima et al.
patent: 4979134 (1990-12-01), Arima et al.
patent: 4984902 (1991-01-01), Crowley et al.
patent: 5098198 (1992-03-01), Nulman et al.
patent: 5102231 (1992-04-01), Loewenstein et al.
patent: 5108792 (1992-04-01), Anderson et al.
patent: 5179677 (1993-01-01), Anderson et al.

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