Infinitesimal displacement measuring apparatus and optical pick-

Details Infinitesimal displacement measuring apparatus and optical pick- Infinitesimal displacement measuring apparatus and optical pick-

1994-12-27

1996-11-05

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356354, 356358, G01B 902

Patent

active

055723233

ABSTRACT:
An infinitesimal displacement measuring apparatus applicable to an optical pick-up unit of an optical disk unit includes a light source for emitting a light beam, an optical system through which the light beam emitted from the light source travels to an article, a double grating unit on which the light beam reflected by the article is incident, the double grating unit having a first grating and a second grating, the first grating receiving the light beam and generating .+-.n-th order diffraction light beams, the second grating receiving the .+-.n-th order diffraction light beams from the first grating and generating .+-.m-th order diffraction light beams, a photo-detector for detecting an interference pattern formed by the .+-.m-th order diffraction light beams from the second grating of the double grating unit, and an operation circuit for carrying out an operation obtaining a displacement of the article in a direction parallel to an optical axis of the optical system based on the interference pattern detected by the photo-detector.

REFERENCES:
patent: 5015835 (1991-05-01), Ohuchida et al.
U.S. Application Ser. No. 08/191,321, filed Feb. 2, 1994.
U.S. Application Ser. No. 08/191,599, filed Feb. 4, 1994.

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