Solid state imaging device having partition wall for partitionin

Details Solid state imaging device having partition wall for partitionin Solid state imaging device having partition wall for partitionin

1994-11-23

1995-11-28

Picardat, Kevin M.

Fishing, trapping, and vermin destroying

437 3, 437 4, 437225, H01L 3118

Patent

active

054707609

ABSTRACT:
A solid state imaging device capable of efficiently collecting incident light onto its photodetecting portions and a method for manufacturing the device are provided. A plurality of photodetecting portions and an electric charge transfer portion are formed on a surface of a semiconductor substrate, and a flattening layer which has a light transmitting property and serves to cover the plural number of photodetecting portions and the electric charge transfer portion is formed. A partition wall material layer for covering the flattening layer is formed, and a plurality of approximately rectangular regions of the partition wall material layer are removed to form a partition wall. Then a thermosoftening resin layer which has a light transmitting property and serves to cover the flattening layer and the partition wall is formed. A region of the thermosoftening resin layer covering the partition wall is removed to form a rectangular parallelepiped thermosoftening resin block corresponding to each photodetecting portion. The thermosoftening resin block is softened by heat application to be thermally transformed into a plurality of micro lenses of which bottom portions are peripherally partitioned by the partition wall.

REFERENCES:
patent: 4879250 (1989-11-01), Chan
patent: 5028547 (1991-07-01), Iizuka et al.
patent: 5132251 (1992-07-01), Kim et al.
patent: 5185272 (1993-02-01), Makiuchi et al.
patent: 5234860 (1993-08-01), Gluck
patent: 5238856 (1993-08-01), Tokumitsu
patent: 5266501 (1993-11-01), Imai

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