Fishing – trapping – and vermin destroying
Patent
1988-12-27
1992-03-24
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437228, 437238, 437941, 437946, H01L 21302, H01L 2128
Patent
active
050988662
ABSTRACT:
Hot-electron-induced degradation of a semiconductor device (10) is reduced by converting the silicon surface (18) to a fluorinated-silicon compound interface region (23). The fluorinated-silicon compound interface region (23) is formed by etching the device (10) in a fumer (30) using anhydrous hydrofluoric acid. After a sacrificial oxide is grown over the silicon surface (18), the device (10) is placed in a container (32). A mixture of nitrogen, moistened nitrogen and nitrogen/anhydrous hydrofluoric acid is injected into the container (32) to conduct the etch. The anhydrous hydrofluoric acid converts the silicon to a fluorinated-silicon compound, such as H.sub.2 SiF.sub.6, and water. The fluorinated-silicon compound interface region (23) has stronger molecular bonds than the typical hydrogen-silicon formed at the oxide/silicon interface and is, therefore, less likely to be broken apart by hot-electrons.
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Clark David R.
Tipton Charlotte M.
Chaudhuri Olik
Comfort James T.
Kesterson James C.
Sharp Melvin
Texas Instruments Incorporated
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