Projection exposure apparatus including an illumination optical

Details Projection exposure apparatus including an illumination optical Projection exposure apparatus including an illumination optical

1995-06-06

2000-10-03

Braun, Fred L

Photocopying

Projection printing and copying cameras

Step and repeat

G03B 2742

Patent

active

061280682

ABSTRACT:
An exposure apparatus for forming an image of a fine pattern having linear features extending in orthogonal first and second directions. The apparatus includes an illumination optical system for illuminating the pattern, the illumination optical system including a device for forming a secondary light source having decreased intensity portions at a center thereof and on first and second axes defined to intersect with each other at the center and defined along the first and second directions, respectively, wherein the secondary light source includes four sections being distributed in four quadrants defined by the center and the first and second axes, a projection optical system for projecting, on an image plane, an image of the pattern illuminated with light from the secondary light source, and a quartered detector, having four detector sections, for detecting a light quantity distribution of the secondary light source. Each of the four detector sections of the quartered detector independently detects a light quantity of a corresponding one of the four sections of the secondary light source.

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