Solid state image sensing element improved in sensitivity and pr

Details Solid state image sensing element improved in sensitivity and pr Solid state image sensing element improved in sensitivity and pr

1998-04-08

2000-08-15

Lee, John R

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

2502141, 250216, 257432, H01L 3100, H01L 2714

Patent

active

061040215

ABSTRACT:
A solid state image sensing element has a miniature lens buried in a transparent interlayer insulating layer over a photo diode formed in a semiconductor substrate, and the miniature lens occupies an area wider than an area occupied by the photo diode so that the solid state image sensing element is sensitive without sacrifice of production cost.

REFERENCES:
patent: 5323052 (1994-06-01), Koyama
patent: 5371397 (1994-12-01), Maegawa et al.
patent: 5844289 (1998-12-01), Teranishi et al.
patent: 6002139 (1999-12-01), Katagiri

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