Heat treating apparatus

Details Heat treating apparatus Heat treating apparatus

1998-07-15

2000-08-15

Pelham, Joseph

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

392418, 118729, 414935, C23C 1600

Patent

active

061040029

ABSTRACT:
A substrate heat treating apparatus with a substrate support plate having a plurality of holes, a heating element to heat the substrate through the support plate, and substrate support pins extending through the plurality of holes in the support plate. Each support pin is mounted so that it is slidable in a horizontal direction within each of the plurality of holes in the support plate.

REFERENCES:
patent: 4790258 (1988-12-01), Drage et al.
patent: 5016332 (1991-05-01), Reichelderfer et al.
patent: 5665167 (1997-09-01), Deguchi et al.
patent: 5669977 (1997-09-01), Shufflebotham et al.

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