Method of production of amorphous hydrogenated carbon layer

Details Method of production of amorphous hydrogenated carbon layer Method of production of amorphous hydrogenated carbon layer

1988-03-07

1991-03-19

Niebling, John F.

Chemistry: electrical and wave energy

Processes and products

Electrostatic field or electrical discharge

204168, 204164, 430 58, 430 61, 430132, 427 41, C25D 900

Patent

active

050008315

ABSTRACT:
The present invention provides a method of plasma-polymerization at low temperature (from normal temperature to about 100.degree. C.) and that at low frequency.

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