Heat treating apparatus with cooling fluid nozzles

Details Heat treating apparatus with cooling fluid nozzles Heat treating apparatus with cooling fluid nozzles

1990-12-10

1992-03-24

Ford, John

Heat exchange

Movable heating or cooling surface

Rotary drum

165 61, 165 64, 118724, 118725, 219390, 432144, H05B 364, F27B 516, F27D 900

Patent

active

050978900

ABSTRACT:
A cooling system is disclosed which is incorporated in a heat treating apparatus for use in a manufacturing process of a semiconductor device etc. The heat treating apparatus includes a reaction tube for receiving products to be heat treated in its uniformly heated zone, and a heater which surrounds the reaction tube. Inlet means for blowing a cooling fluid and exhaust means for collecting that cooling fluid which is heated after the cooling function thereof has been achieved are provided. The fluid is blown from the inlet means around the reaction tube, substantially perpendicular to the axis of the reduction tube, and as a result, a flow of cooling fluid from the inlet means toward the exhaust means is established beyond the length of the uniformly heated zone, thus the entire reaction zone within the reaction tube is uniformly cooled.

REFERENCES:
patent: 2700365 (1955-01-01), Pawlyk
patent: 3167812 (1965-02-01), Bennigsen
patent: 3470624 (1969-10-01), Plotkowiak
patent: 3862397 (1975-01-01), Andersen et al.
patent: 3922527 (1975-11-01), Witkin et al.
patent: 3964430 (1976-06-01), Purmal
patent: 4753192 (1988-06-01), Goldsmith et al.
patent: 4858557 (1989-08-01), Pozzetti et al.
patent: 4950870 (1990-08-01), Mitsuhashi et al.
patent: 4957781 (1990-09-01), Kanegae et al.

Affiliated with

Also associated with

Rating

Heat treating apparatus with cooling fluid nozzles does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Heat treating apparatus with cooling fluid nozzles, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heat treating apparatus with cooling fluid nozzles will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2003008