Apparatus suitable for processing semiconductor slices

Details Apparatus suitable for processing semiconductor slices Apparatus suitable for processing semiconductor slices

1987-12-02

1991-03-19

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

Operating or controlling device engaged and moved by work or...

134 56R, 134147, 134155, 251156, 13762427, B08B 304

Patent

active

050002074

ABSTRACT:
Apparatus suitable for processing semiconductor slices, comprises a tank (1) for receiving a jig carrying semiconductor slices, a first supply line (2) for supplying a processing liquid to the tank (1), a supply valve (3) for controlling liquid supply through the first supply line (2), the supply valve (3) being operable in response to changes in fluid pressure at a control port (4) of the supply valve (3) and a second supply line (5) for supplying fluid to the control port (4) to control operation of the supply valve (3). The second supply line (5) communicates with an inlet (8) of the tank (1) via a control valve (7) which is operable in response to changes within the tank to control the fluid pressure at the control port (4) and so control operation of the supply valve (3).
In the arrangement shown in FIG. 1, a valve member (7a) of the valve (7) is carried by a platform (9) pivotally mounted within the tank (1). The weight of a jig carrying semiconductor slices acting on the platform (9) causes the platform (9) to tilt to close the control valve (7) thereby increasing the fluid pressure at the control port (4), causing the supply valve to open and so supply liquid to the tank via the inlet (1').

REFERENCES:
patent: 927320 (1909-07-01), Blum
patent: 2370775 (1945-03-01), Capita
patent: 3095463 (1963-06-01), Chang et al.
patent: 3151628 (1964-10-01), Heckert
patent: 3427198 (1969-02-01), Hill
patent: 3662997 (1972-05-01), Bloom
patent: 4435151 (1984-03-01), Matumoto et al.
patent: 4554936 (1985-11-01), Tingley

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