Method and apparatus for transporting articles

Details Method and apparatus for transporting articles Method and apparatus for transporting articles

1999-03-23

2000-08-15

Gravini, Stephen

Drying and gas or vapor contact with solids

Process

Gas or vapor pressure varies during treatment

34410, 34417, 34467, 34 72, 34210, 438 14, F26B 504

Patent

active

06101740&

ABSTRACT:
In one embodiment, a cart (5) having a first vessel (10) which fits within a second vessel (90) is used to transport and store an integrated circuit substrate. The integrated circuit substrate is placed within the first vessel (10) and the door (18) of the first vessel (10) is closed and sealed against a door seal (24). The first vessel (10) is then purged with nitrogen to expel moisture and reactive gases from the interior of the first vessel (10). After purging, the first vessel (10) is then placed within the second vessel (90). The door (102) of the second vessel (90) is then closed and sealed against a door seal (104). The second vessel (90) is then purged with nitrogen to expel moisture and reactive gases from the interior of the second vessel (90). The cart (5) containing the integrated circuit substrate is then transported to the next manufacturing area. Integrated circuits and other articles may be manufacturing using the cart system of the present invention.

REFERENCES:
patent: 4850380 (1989-07-01), Koslow
patent: 5370491 (1994-12-01), Bonora et al.
patent: 5482161 (1996-01-01), Williams et al.
patent: 5829939 (1998-11-01), Iwai et al.
patent: 5848933 (1998-12-01), Roberson, Jr. et al.
patent: 5902088 (1999-05-01), Fairbairn et al.

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