Electric heating – Heating devices – With power supply and voltage or current regulation or...
Patent
1996-10-09
1997-12-30
Paschall, Mark H.
Electric heating
Heating devices
With power supply and voltage or current regulation or...
219449, 219453, 219481, 219486, 340655, H05B 102
Patent
active
057026246
ABSTRACT:
A heat treatment control system to cure a photoresist that is deposited upon a semiconductor substrate is described. The heat treatment system has a hot plate with a heating element and temperature sensing devices that are in close proximity to the semiconductor substrate. The heat treatment system also has a controlling device that will selectively provide an electrical power source to the heating element to heat the semiconductor wafer. The coupling of the heating element to an electrical power source is determined by an electrical signal from one of the temperature sensing devices that have been conditioned and compared to a set temperature signal to provide an error signal. The controlling device will examine the error signal and adjust the temperature. An over temperature alarm circuit is connected to the second temperature sensing device. If the temperature sensing device indicates the temperature of the semiconductor substrate is significantly greater than the set temperature, the over temperature alarm circuit will activate an audible and visual alarm and transfer a over temperature fault signal to the controlling device. A power monitor circuit will determine the presence of the electrical current in the heating element and activate an audible and visual alarm. The operating personnel will disconnect the electrical power source, if there is a over temperature alarm or a power fault alarm.
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Kuo Chin-Chuan
Liao Ching-Wen
Lin Tsun-Ching
Peng Chi-Kang
Ackerman Stephen B.
Paschall Mark H.
Saile George O.
Taiwan Semiconductors Manfuacturing Company, Ltd
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