Fishing – trapping – and vermin destroying
Patent
1989-09-20
1994-11-22
Wilczewski, Mary
Fishing, trapping, and vermin destroying
437 41, 437101, 437228, 156652, 156663, 257 53, 257 57, H01L 21336, H01L 2184
Patent
active
053669126
ABSTRACT:
A thin-film transistor comprises a first amorphous semiconductor layer acting as a channel, a second n.sup.+ amorphous semiconductor layer formed on the first amorphous semiconductor layer, a diffusion preventive layer of chromium provided between the second amorphous semiconductor layer and source/drain metal electrodes. The diffusion preventive layer is formed by removing a portion of a diffusion preventive layer forming film not being covered by a patterned resist film using a first etchant. Then, the second amorphous semiconductor layer is formed by removing a portion of a second amorphous semiconductor layer forming film not being covered by the patterned resist film or the diffusion preventive layer using a second etchant which dissolves the second amorphous semiconductor layer forming film but does not dissolve the diffusion preventive layer.
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Fuji 'Xerox Co., Ltd.
Wilczewski Mary
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