Rotary-cup liquid supply device

Details Rotary-cup liquid supply device Rotary-cup liquid supply device

1995-11-09

1997-08-26

Czaja, Donald E.

Animal husbandry

Incubator

Warmed by electrical component

118320, 118 52, 118500, 269 21, B05C 500, B05C 1302

Patent

active

056606346

ABSTRACT:
A vacuum chuck and an inner cup are rotated together by a spinner for spreading and coating a coating solution uniformly on a glass substrate in the inner cup under centrifugal forces. Under the centrifugal forces, gases that are present inward of a rectangular ridge in the inner cup are forced to flow outwardly through a gap between the rectangular ridge and a flow-rectifying plate 42 and also through holes defined in the rectangular ridge. Therefore, turbulent flows and pressure fluctuations are minimized in a space defined inward of the rectangular ridge, i.e., a space which accommodates the glass substrate placed on a bottom surface of the inner cup inwardly of the rectangular ridge. The coating solution applied to the upper surface of the glass substrate is allowed to form a uniform film thereon.

REFERENCES:
patent: 3730134 (1973-05-01), Kadi
patent: 4640846 (1987-02-01), Kuo
patent: 4889069 (1989-12-01), Kawakami
patent: 5042421 (1991-08-01), Anbe
patent: 5234499 (1993-08-01), Sasaki
patent: 5415691 (1995-05-01), Fujiyama et al.
patent: 5439519 (1995-08-01), Sago et al.

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