Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1992-06-26
1994-05-24
Rosenberger, Richard A.
Optics: measuring and testing
By polarized light examination
With light attenuation
73105, 356376, G01B 734, G01B 1130
Patent
active
053153731
ABSTRACT:
A method for detecting a minute displacement of a probe includes an emission from a light source of two light beams having different polarizing directions. The light beams are subsequently diverged by a first lens so as to pass through a beam splitter towards a separating prism. The light beams having passed through the prism are separated into first and second measuring beams which are subsequently focused by a second lens on first and second, spaced reflecting surfaces. The first and second measuring beams are then reflected by the first and second reflecting surfaces, respectively, so as to enter respective photodetectors after having passed through the separating prism, the beam splitter and a polarizing beam splitter for passing therethrough the first and second measuring beams or reflecting them depending on the polarizing direction of the incoming light. The first and second photodetectors outputs respective signals indicative of the associated positions of foci which are then processed by a signal processing circuit to provide an indication of the minute displacement of the probe.
REFERENCES:
patent: 4017188 (1977-04-01), Sawatari
patent: 5067817 (1991-11-01), Glenn
Ikemoto Yoshihiro
Itou Tatsuo
Kubo Keishi
Matsushita Electric - Industrial Co., Ltd.
Rosenberger Richard A.
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