Method for annealing a semiconductor

Details Method for annealing a semiconductor Method for annealing a semiconductor

1994-07-15

1996-11-26

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

117200, 437174, H01L 2126

Patent

active

055785204

ABSTRACT:
A method for manufacturing a semiconductor device including preparing a multi-chamber system having at least first and second chambers, the first chamber for forming a film and the second chamber for processing an object with a laser light; processing a substrate in one of the first and second chambers; transferring the substrate to the other one of the first and second chambers; and processing the substrate in the other one of the chambers, wherein the first and second chambers can be isolated from one another by using a gate valve.

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