Metal working – Method of mechanical manufacture – Electrical device making
Patent
1995-07-13
1997-12-16
Echols, P. W.
Metal working
Method of mechanical manufacture
Electrical device making
216 27, 347 65, H05B 300
Patent
active
056971443
ABSTRACT:
To provide a method of fabricating, using thin-film processes only, a 1,600 dpi head with nozzles arranged two-dimensionally on a substrate, e.g., silicon wafer, a drive LSI, thin-film resistors and thin-film conductors are formed on the silicon wafer. Thereafter, ink channels and through-holes are formed by silicon anisotropic etching from both sides of the silicon wafer. After connecting the orifice plate to the silicon wafer, nozzles are formed in the orifice plate using photoetching.
REFERENCES:
"Design and Development of a Color Thermal Inkjet Print Cartridge"; Jeffrey P. Baker et al.; Hewlett-Packard Journal; Aug. 1988.
Nikkei Mechanical, Dec. 28, 1992 edition, pp. 58-63.
Kawasumi Katsunori
Machida Osamu
Mitani Masao
Shimizu Kazuo
Yamada Kenji
Echols P. W.
Hitachi Koki Co,. Ltd.
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