Micromechanical modulator

Details Micromechanical modulator Micromechanical modulator

1994-01-27

1996-03-19

Epps, Georgia Y.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359248, 359291, 257415, 257419, 257420, G02B 2600

Patent

active

055007619

ABSTRACT:
A method and apparatus for modulating an optical signal using a micromechanical modulator are disclosed. The modulator comprises a membrane, which consists of at least one layer, and a substrate, spaced to form an air gap. The layers of the membrane are characterized in that there is a relationship between the refractive indices of the layers and the refractive index of the substrate. The membrane is suspended in a first position over the substrate by a flexible support arrangement. Bias is applied to the membrane and the substrate to create an electrostatic force to move the membrane towards the substrate to a second position. The reflectivity of the device to an optical signal changes as the membrane moves from the first position to the second position, thereby modulating the signal.

REFERENCES:
patent: 4849071 (1989-07-01), Evans et al.
patent: 4916497 (1990-04-01), Gaul et al.
Aratani, et al., "Process and Design Considerations for Surface Micromachined Beams for a Tunable Interferometer Array in Silicon," Proceedings of the IEEE Micro. ElectroMech. Workshop, Ft. Lauderdale, Fla., Feb. 7-10, 1993, pp. 230-235.
Condon and Odishaw, Handbook of Physics, McGraw Hill, 2nd ed., 1967, pp. 6-102, 6-103.
Solgaard, et al., "Deformable Grating Optical Modulator," Optical Letters, vol. 17, No. 9, May 1992, pp. 688-690.
Wiszniewski, et al., "Mechanical Light Modulator Fabricated on a Silicon Chip Using SIMOX Technology," International Conference on Solid State Sensors & Actuators, Yokohama, Japan, Jun. 7-10, 1993, pp. 1027-1030.

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