Method of making integrated circuits

Details Method of making integrated circuits Method of making integrated circuits

1981-11-12

1982-11-30

Smith, John D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

156603, 156613, 156649, 156643, 1566591, 204192E, 204192EC, 427 94, 427 96, H01L 21316, H01L 2176

Patent

active

043616003

ABSTRACT:
A method of forming in a substrate of monocrystalline silicon semiconductor material having a major surface, a plurality of islands of silicon each including an active region of the substrate adjacent the major surface and surrounded by a body of silicon dioxide separating the islands from the substrate is described.

REFERENCES:
patent: 4292156 (1981-09-01), Matsumoto et al.
patent: 4333964 (1982-06-01), Ghezzo
patent: 4333965 (1982-06-01), Chow
Tango et al., "SOS LSI Technology", Toshiba Review, No. 113, pp. 34-37, Jan.-Feb. 1978.

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