Method for preparing an abrasive lapping disc

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board

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427 40, B05D 306

Patent

active

043615953

ABSTRACT:
A method for preparing a plastic lapping disc overcoated with an abrasive silicon oxide layer. The method comprises the steps of introducing the silicon oxide precursors into an evacuated chamber containing the plastic lapping disc wherein a first major surface of the plastic disc is substantially covered during the glow deposition. The precursors are then subjected to a glow discharge. An abrasive silicon oxide layer is deposited on a second major surface of the disc opposite the first major surface.

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