Stage position measuring apparatus capable of restricting genera

Details Stage position measuring apparatus capable of restricting genera Stage position measuring apparatus capable of restricting genera

1997-09-23

1999-02-09

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

G01B 902

Patent

active

058701982

ABSTRACT:
A stage position measuring apparatus according to the present invention comprises a movable stage being mounted within a chamber, a system for optically measuring an position of the stage, a system for general air-conditioning of an atmosphere within the chamber, a system for locally air-conditioning an optical path of the measuring system, and a system for controlling the local air-conditioning system so that a temperature of an atmosphere in the optical path is substantially identical to that of an atmosphere around the optical path.

REFERENCES:
patent: 4786947 (1988-11-01), Kosugi et al.
patent: 4814625 (1989-03-01), Yabo
patent: 5141318 (1992-08-01), Miyazaki et al.
patent: 5146284 (1992-09-01), Tabarelli et al.
patent: 5392120 (1995-02-01), Kamiya
patent: 5469260 (1995-11-01), Takagi et al.
patent: 5550633 (1996-08-01), Kamiya

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