Apparatus for particle reduction in semiconductor processing equ

Details Apparatus for particle reduction in semiconductor processing equ Apparatus for particle reduction in semiconductor processing equ

1998-03-26

2000-10-24

Till, Terrence R.

Brushing, scrubbing, and general cleaning

Implements

Fabric

152101, A47L 1346

Patent

active

061347426

ABSTRACT:
A cleaning handle is used to clean semiconductor processing equipment to reduce particles. A relatively thin handle is formed for insertion into difficult to reach areas and includes slots for affixing a cleaning wipe. The wipe is fed through the slots and wrapped around the handle to secure the wipe for cleaning the equipment, while preventing damage to the equipment. The wipe may be moistened with a cleaning agent to further enhance the cleaning ability of the handle.

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