Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
Patent
1998-11-20
2000-10-03
Niebling, John F.
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
438669, 438674, 438694, 427209, 427210, H01L 2120
Patent
active
061272507
ABSTRACT:
A method of manufacturing a multi-layered structure includes forming first and second layers, patterning the first layer, determining a distribution of material in at least one area of the first layer, and altering the material content of one of the first and second layers in at least one of the first layer area and a corresponding area of the second layer to approximately match the material content of the first layer and second layers.
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Noddin David B.
Sylvester Mark F.
Genco, Jr. Victor M.
Lattin Christopher
Niebling John F.
W. L. Gore & Associates, Inc.
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