Metal working – Method of mechanical manufacture – Electrical device making
Patent
1997-12-17
1999-02-09
Hall, Carl E.
Metal working
Method of mechanical manufacture
Electrical device making
2960315, 2960318, 216 22, 360113, G11B 542
Patent
active
058678905
ABSTRACT:
A method is described for making a merged thin film read/write head where a common layer serves as both a magnetic shield for the magentoresistive read element and the first pole piece for the inductive write element, and where the first pole piece thus includes a pedestal pole tip portion that extends up from the first pole piece layer. During fabrication a nonmagnetic spacer layer is deposited over the second pole tip and the gap layer, and then reactive ion etching (RIE) removes the spacer layer from the top of the second pole tip and the gap layer not beneath the second pole piece, but leaves the spacer layer on the sidewalls of the second pole tip. The ion bombardment of the RIE process is perpendicular to the gap layer and is continued after removal of the spacer layer to also remove the gap layer in the region not beneath the second pole piece so that the first pole piece layer is exposed. The RIE uses a gas that is more reactive with the gap material than the material of the second pole tip so that the top surface of the second pole tip is not substantially removed during etching of the gap layer. Next, ion milling removes the material from the layer of the first pole piece to form a first pedestal pole tip beneath the gap. Material ejected from the first pole piece layer during ion milling that gets redeposited on the second pole piece is prevented from contacting the sidewalls of the second pole tip because of the spacer layer.
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Hsiao Richard
Hwang Cherngye
Robertson Neil Leslie
Santini Hugo Alberto
Berthold Thomas R.
Caputo Davide
Hall Carl E.
International Business Machines - Corporation
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