Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1995-06-07
1997-09-23
Wieder, Kenneth A.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324758, G01R 3102
Patent
active
056708882
ABSTRACT:
A method and apparatus for handling wafers. A wafer pick moves along a horizontal x-axis to unload a wafer from a cassette and position the wafer over a chuck. The chuck moves upwardly along a z-axis perpendicular to the surface of the wafer and lifts the wafer off the pick. The pick retracts through a slot in the chuck and a test probe moves along the x-axis to position itself over the wafer and chuck with reference to a calculated wafer center. The chuck then moves upwardly to engage the surface of the wafer with the probe. Wafer characteristics are tested at several test points located on a circle on the surface of the wafer by repeatedly lowering the chuck, rotating the chuck by a small amount, and raising the chuck to engage the wafer with the probe. The probe is then positioned to test another circle of points.
REFERENCES:
patent: 4204155 (1980-05-01), Terry
patent: 4665360 (1987-05-01), Phillips
patent: 4749943 (1988-06-01), Black
patent: 4755746 (1988-07-01), Mallory et al.
patent: 4755747 (1988-07-01), Sato
patent: 4775281 (1988-10-01), Pretakis
patent: 4786867 (1988-11-01), Yamatsu
patent: 4818169 (1989-04-01), Schram et al.
patent: 4907931 (1990-03-01), Mallory et al.
patent: 4929893 (1990-05-01), Sato et al.
patent: 5166603 (1992-11-01), Hoshi
patent: 5186238 (1993-02-01), del Puerto et al.
patent: 5220279 (1993-06-01), Nagasawa
Kobert Russell M.
Wieder Kenneth A.
LandOfFree
Method for transporting and testing wafers does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for transporting and testing wafers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for transporting and testing wafers will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1939782