Illuminating optical system in an exposure apparatus

Details Illuminating optical system in an exposure apparatus Illuminating optical system in an exposure apparatus

1989-02-22

1991-09-17

Arnold, Bruce Y.

Optical: systems and elements

Polarization without modulation

Polarizarion by dichroism

359495, 359618, G02B 2714

Patent

active

050489267

ABSTRACT:
An illuminating optical system for illuminating an object comprises a light source emitting a radiation beam, means for dividing the radiation beam into a plurality of beams, a device for rotating at least one of the plurality of divided beams about an optic axis parallel to the direction of travel of the beam, and a deivce for superposing the divided beams one upon the other in a common area on the object.

REFERENCES:
patent: 4053898 (1977-10-01), Hirayama et al.
patent: 4355871 (1982-10-01), Nevyas et al.
patent: 4601575 (1986-07-01), Tamaki
patent: 4619508 (1986-10-01), Shibuya et al.
patent: 4669088 (1987-05-01), Waite
patent: 4769750 (1988-09-01), Matsumoto et al.

Affiliated with

Also associated with

Rating

Illuminating optical system in an exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Illuminating optical system in an exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illuminating optical system in an exposure apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1912354