Method for forming a laser and light detector on a semiconductor

Details Method for forming a laser and light detector on a semiconductor Method for forming a laser and light detector on a semiconductor

1991-06-12

1993-10-12

Wilczewski, Mary

Fishing, trapping, and vermin destroying

372 50, 148DIG95, H01L 2120

Patent

active

052525139

ABSTRACT:
The present invention is an apparatus and method for providing detection of a laser output on a semiconductor wafer. A laser cavity and a detection cavity are formed on a semiconductor wafer in parallel such that light emitted laterally from the laser cavity is detected by the detection cavity. The amount of light detected can then be transformed into data, which in turn can be used to control the output of the laser.

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