Thermal fixture for testing integrated circuits

Details Thermal fixture for testing integrated circuits Thermal fixture for testing integrated circuits

1988-09-09

1989-09-26

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, G01R 3102

Patent

active

048703559

ABSTRACT:
A device for individually testing semiconductor integrated circuits in wafer form at elevated and/or reduced temperatures include a fixture body for connection to a conventional probing device. The fixture body has an open-ended aperture to permit visual inspection of a circuit being tested, a plenum to receive pressurized gas at a selected temperature(s), and nozzles to direct the gas from the plenum into the aperture for ejection onto to the surface of the integrated circuit being tested to rapdily bring that circuit to the temperature of the gas.

REFERENCES:
patent: 3710251 (1973-01-01), Hagge et al.

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