Ultraviolet transmitting glasses for EPROM windows

Details Ultraviolet transmitting glasses for EPROM windows Ultraviolet transmitting glasses for EPROM windows

1989-12-11

1990-07-03

Hille, Rolf

357 72, 357 73, 357 74, H01L 3902, H01L 2328, H01L 2330, H01L 2302

Patent

active

049395696

ABSTRACT:
Ultraviolet transmitting glasses exhibiting coefficients of thermal expansion between 46-52.times.10.sup.-7 /.degree.C. and transmittances at a thickness of 1 mm of at least 80% at a wavelength of 254 nm which are essentially free of fluoride and consist essentially, in mole percent, of 60-70% SiO.sub.2, 16-20% B.sub.2 O.sub.3, 1-8% Al.sub.2 O.sub.3, 1-6% Li.sub.2 O, 2.5-5% N.sub.2 O, 0-3% K.sub.2 O, and 0-1.25% Cl, w9herein the mole ratio R.sub.2 O:R.sub.2 O.sub.3 is greater than 0.3, but less than 0.5.

REFERENCES:
patent: 4460915 (1984-07-01), Engel
patent: 4630172 (1986-12-01), Szenerson et al.
patent: 4644384 (1987-02-01), Charoensakvirochana et al.
patent: 4663833 (1987-05-01), Tanaka et al.
patent: 4710797 (1987-12-01), Tanaka
patent: 4723156 (1988-02-01), Okuaki

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