Pulsed chemical vapor deposition of gradient index optical mater

Details Pulsed chemical vapor deposition of gradient index optical mater Pulsed chemical vapor deposition of gradient index optical mater

1990-09-27

1992-04-07

Pianalto, Bernard

Coating processes

Optical element produced

427250, 4272552, 427314, B05D 506

Patent

active

051026945

ABSTRACT:
Periodic pulsing of the gaseous reactant flows during chemical vapor deposition of gradient index optical material markedly improves the refractive index homogeneity of the deposit with the frequency of the pulsing being variable over a wide range but the number and size of the inhomogeneities, or nodules, being significantly reduced at higher pulsing frequencies.

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