Coherent light generators – Particular active media – Semiconductor
Patent
1991-07-24
1992-12-29
Healy, Brian
Coherent light generators
Particular active media
Semiconductor
372 43, 372 50, 437 51, 437129, H01S 319, H01L 2120
Patent
active
051757400
ABSTRACT:
A ridge-waveguide laser is fabricated by epitaxially growing a GaAs-based heterostructure, disposing an AlAs etch stop layer on the heterostructure, disposing epitaxial layers on the etch stop layer, and etching the heterostructure to form the laser whereby the etch stop layer prevents further etching into said heterostructure.
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Elman Boris S.
Sharfin Wayne F.
GTE Laboratories Incorporated
Healy Brian
Lohmann, III Victor F.
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