Method of and photometric arrangement for measuring and controll

Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined

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356281, 356282, 356 4, 427 8, G05D 503, G05F 166, B05D 100

Patent

active

044697139

ABSTRACT:
An arrangement for measuring and controlling the thickness of optically transparent coatings during their build-up on substrates in vacuum coating installations. The measurement is carried out by determining at least one reference value and at least one measured value for the transmission or reflection value of the coated object by using a measuring light beam, a monochromator, a photo-receiver, an amplifier and an analyzing circuit.

REFERENCES:
patent: 3773548 (1973-11-01), Baker et al.
patent: 4024291 (1977-05-01), Wilmanns
patent: 4068016 (1978-01-01), Wilmanns

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