Apparatus for measuring thickness of layer on substance

Details Apparatus for measuring thickness of layer on substance Apparatus for measuring thickness of layer on substance

1987-03-31

1988-05-17

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250341, 356382, G01N 2186

Patent

active

047452919

ABSTRACT:
A surface layer thickness measuring apparatus lower in price with the use of a light ray measuring system only. The correct surface layer thickness may be measured, independently of the variation in the temperature of the measured, in the external light rays, in the radiation energy of the reference light ray source, in the chopper temperature, the influences by the temperature in the surface layer thickness measuring apparatus, through the mode combination by the driving operation of the opening and closing device and the total reflection mirror.

REFERENCES:
patent: 3433052 (1969-03-01), Maley
patent: 3973122 (1976-08-01), Goldberg
patent: 3994586 (1976-11-01), Sharkins et al.
patent: 4027161 (1977-05-01), Williams et al.
patent: 4549079 (1985-10-01), Terasaka et al.
patent: 4687333 (1987-08-01), Odasima et al.

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