Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1996-01-02
1998-02-24
Braun, Fred L.
Photocopying
Projection printing and copying cameras
Step and repeat
355 68, 355 77, G03B 2742
Patent
active
057216088
ABSTRACT:
A projection exposure apparatus has an illumination optical system for illuminating a mask, on which a predetermined pattern is formed, with light from a light source, a projection optical system for forming an image of the pattern of the mask on a photosensitive substrate, a mask stage for holding the mask and moving the mask within a plane perpendicular to the optical axis of the projection optical system, a substrate stage for moving the photosensitive substrate within a plane conjugate to the plane with respect to the projection optical system, and imaging characteristic correction device for correcting an imaging characteristic of the projection optical system. The apparatus synchronously moves the mask and the photosensitive substrate along the optical axis of the projection optical system so as to expose the entire pattern surface of the mask. The apparatus includes an incident light intensity input device for inputting the intensity of the illumination light, which is incident on the projection optical system through the mask, in accordance with the position of the mask, and an imaging characteristic calculation device for calculating a variation in imaging characteristic of the projection optical system on the basis of information from the incident light intensity input device. The imaging characteristic correction device is controlled on the basis of a result obtained by the imaging characteristic calculation device.
REFERENCES:
patent: 4558949 (1985-12-01), Uehara et al.
patent: 4650983 (1987-03-01), Suwa
patent: 4666273 (1987-05-01), Shimizu et al.
patent: 4687322 (1987-08-01), Tanimoto et al.
patent: 4780747 (1988-10-01), Suzuki et al.
patent: 4871237 (1989-10-01), Anzai et al.
patent: 4920505 (1990-04-01), Suzuki
patent: 5160962 (1992-11-01), Miura et al.
patent: 5337097 (1994-08-01), Suzuki et al.
patent: 5343270 (1994-08-01), Sakakibara et al.
Braun Fred L.
Nikon Corporation
LandOfFree
Projection exposure method and apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Projection exposure method and apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection exposure method and apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1878001