Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1996-10-04

1999-05-04

Rutledge, D.

Photocopying

Projection printing and copying cameras

Step and repeat

355 55, 250548, 356400, G03B 2752

Patent

active

059009268

ABSTRACT:
A projection exposure apparatus performs focus adjustment to correct variations in the focal position of a projection optical system which are caused by absorption of exposure light by a refraction system in the projection optical system. The projection optical system arranged in this projection exposure apparatus includes a refraction system having a positive refracting power, and a reflecting mirror positioned to be coaxial with the refraction system. The projection exposure apparatus includes a photodetection device for detecting light, of light emitted from an illumination optical system and transmitted through a first substrate, which is transmitted through the reflecting mirror, and an adjustment device for adjusting the in-focus state between the first substrate, a second substrate, and the projection optical system in accordance with an output from the photodetection device.

REFERENCES:
patent: 4037969 (1977-07-01), Feldman et al.
patent: 4425037 (1984-01-01), Hershel et al.
patent: 4690528 (1987-09-01), Tanimoto et al.
patent: 4806774 (1989-02-01), Lin et al.
patent: 4871237 (1989-10-01), Anzai et al.
patent: 5246803 (1993-09-01), Hanrahan et al.
patent: 5319444 (1994-06-01), Saitoh et al.

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