Method of manufacturing an ultrasonic transducer

Metal working – Piezoelectric device making

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29840, 310327, 310334, 310366, H01L 4122

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047471921

ABSTRACT:
Electrode layers are formed on planes of a plate-shaped piezoelectric element to provide an ultrasonic transducer material. The ultrasonic transducer material is bonded to an electrically insulating substrate by electrically conductive adhesive. A plurality of conductors is provided on the substrate in the array direction and a direction perpendicular to the array direction. A printed circuit is formed on the backside of the substrate to connect the conductors. Notches are cut out in the ultrasonic transducer material to divide it into a plurality of transducer elements arranged in the array direction and a direction perpendicular to the array direction. A ground electrode connects the second electrodes of the ultrasonic transducer elements. The transducer elements are impressed with voltage through the printed circuit and ground electrode to issue ultrasonic waves.

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Real-Time Imaging of Internal Body Structures; Ultrasonics, Nov. 1974, p. 235.
Pappalardo, "Hybrid Linear and Matrix Acoustic Arrays," Ultrasonics, pp. 81-86, Mar. 1981.

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